Microengineering Aerospace Systems
Henry Helvajian, editor
Chapter 1: Introduction to MEMS
M. Mehregany and S. Roy
(Microfabrication Laboratory, Electrical Engineering and Applied
Physics,
Case Western Reserve University, Cleveland, Ohio.)
1.1 Overview
1.1.1 Historical Background
1.1.1.1 Silicon Pressure Sensor Technology
1.1.1.2 Micromachining
1.1.1.3 MEMS
1.2 Fabrication Technologies
1.2.1 IC Fabrication
1.2.1.1 Film Growth
1.2.1.2 Doping
1.2.1.3 Lithography
1.2.1.4 Etching
1.2.2 Bulk Micromachining and Wafer Bonding
1.2.3 Surface Micromachining
1.2.4 Micromolding
1.3 MEMS Components
1.3.1 Pressure Sensors
1.3.2 Accelerometers
1.3.3 DMDs
1.3.4 Sensors and Actuators in Aerospace Applications
1.4 Commercial Applications
1.4.1 MEMS Market
1.4.2 MEMS Industry Structure
1.5 Trends in MEMS Technology
1.5.1 Design and Simulation
1.5.2 Materials Issues
1.5.3 Integration with Microelectronics
