Microengineering Aerospace Systems
Henry Helvajian, editor
Chapter 1: Introduction to MEMS (cont.)
M. Mehregany and S. Roy
1.6 Journals and Conferences
Before 1980, the literature on solid-state sensors and actuators was scattered in various application fields such as electronic devices, automobiles, instrumentation, materials, physics, and analytical chemistry. The journal Sensors and Actuators was first published in 1980 to provide a forum for publication of papers in the field. Another journal, Sensors and Materials, issued by MYU Japan, began publication in 1989. Rapid advances in device design, fabrication, materials, testing, packaging, and applications, as well as the rapid expansion of the field, have brought about many journals, symposia, and conferences to report on the progress being made. There are now many publications dealing with sensors and actuators, including trade journals and regional publications. In the MEMS area, the Journal of Microelectromechanical Systems is a quarterly (started in 1992) published jointly by the Institute of Electrical and Electronics Engineers (IEEE) and the American Society of Mechanical Engineers (ASME), the Journal of Micromechanics and Microengineering is a quarterly (started in 1991) published by the American Institute of Physics, while Microsystem Technology is a quarterly (started in 1995) published by Springer-Verlag.
The International Conference on Solid State Sensors and Actuators, also referred to as the Transducers Conference, was established in 1981. The conference sponsors biannual meetings (during odd years), rotating between the United States, Japan, and Europe. The latest meeting concluded in Chicago in June 1997 (called Transducers '97). The conference also publishes a technical digest. In addition, some of the papers presented at the conference are published in special issues of Sensors and Actuators.
Regional conferences on sensors, actuators, and MEMS are held in both Japan and Europe. In the United States, a workshop on solid-state sensors and actuators has been held at Hilton Head, North Carolina, during even years. Technical digests from these workshops are also published. Another series of international conferences, entitled IEEE Workshop on Micro Electro Mechanical Systems, started in 1987 and has met annually between 1989 and 1998. Each of the conferences has published a proceedings volume. Finally, a number of conferences in other fields (e.g., International Electron Device Meeting, Device Research Conference/Materials Research Conference, The Electrochemical Society Meeting, and many SPIE conferences) hold sessions on microsensors, microactuators, and MEMS.
Next: 1.7 References
